The original vacuum gauge was
invented by a thin glass tube with mercury filled at one end of Torry. According
to the vacuum range and the operating environment, the most commonly used vacuum
meters are capacitance diaphragm vacuum meter, thermocouple vacuum meter, hot
cathode ionization vacuum meter and cold cathode ionization vacuum
meter.
These vacuum meters use different physical phenomena, among which the
capacitance diaphragm vacuum meter uses force, thermocouple vacuum meter uses
heat conduction, and ionization vacuum meter uses vacuum discharge.
The
following points should be noted when vacuum timing is selected:
1: Whether
the vacuum meter has enough measurement accuracy within the pressure range
required by the equipment;
2: Whether the gas under test will damage the
vacuum meter;
3: Whether the vacuum gauge will affect the vacuum environment
under test;
4: Whether the pressure measured by vacuum gauge is full pressure
or partial pressure, whether it has been calibrated or not is related to the gas
type;
5: Whether the vacuum meter can realize continuous measurement,
numerical indication and reaction time;
6: The stability, reliability and
life of vacuum gauge.
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