3/03/2019
What kinds of vacuum pumps are available in a vacuum system?
Vacuum system is composed of vacuum chamber, vacuum pump or vacuum unit, vacuum pipe, vacuum valve, collector and other vacuum components, electrical control system, etc. It is widely used in electronic semiconductor industry, photoelectric backlight module, mechanical processing and other industries. Vacuum system is usually composed of several vacuum pumps, according to their characteristics in different areas play a role.
1, the main pump
The main pump is used to obtain the required vacuum degree to meet the specific process requirements of the vacuum pump. Depending on the ultimate pressure required by the vacuum system, the ultimate pressure of the main pump is generally half to one order of magnitude lower than that required by the system in the selection process.
2. Rough pumping pump
Rough pump refers to the vacuum pump which starts to pump air from the atmospheric pressure and reduces the pressure of the pumping system to the point where the main pump system can start to work.
The pressure achieved by the rough pump must be less than the starting working pressure of the main pump. The rough pump can also be used as the front pump.
3. Front stage pump
The pre-stage pump is a vacuum pump which maintains the pre-stage pressure of a pump below its pre-stage critical pressure. The front stage pump can also be used as a rough pump, but it must meet the requirements of pre-pumping time and vacuum degree.
At the same time, the front stage pump is required to meet the pre-vacuum conditions required by the main pump; Under the maximum allowable exhaust pressure of the main pump, the front pump must timely discharge the most atmospheric volume discharged by the main pump, and the pumping speed of the front pump must be in accordance with the actual pumping speed of the pump at the actual inlet pressure.
4. Maintain the pump
Maintenance pump refers to the vacuum system when the amount of air is very small, can not effectively use the front pump. To this end, in the vacuum system, another auxiliary pump with low pumping speed is used to maintain the normal operation of the main pump or to maintain the vacuum pump with low pressure required by the pumped system.
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