The working pressure of vacuum pump should meet the limit vacuum and working pressure requirements of vacuum equipment. For example: vacuum coating requirements 1× 10-5mmhg vacuum, vacuum pump selected to at least 5× 10-6mmhg vacuum. Usually choose the vacuum of the pump is higher than vacuum equipment vacuum degree half to an order of magnitude.
From raising vacuum pump on the basis of the application ability, for the product overall applicability of continuous play, can increase the effectiveness of all aspects of product development, and to develop the advantage of expanding its application ability to enhance, completes the practical basis of extension products, in order to give full play to the effect of practical application, as all aspects of product quality requirements, is to improve the way to drive its operation, give full play to its various aspects ability, so as to promote the product the overall utilization rate of ascension.
Vacuum pump unit vortex pump has been widely used in many fields: (1) semiconductor industry: thin film manufacturing equipment, semiconductor device packaging equipment; (2) scientific instrument industry: synchronous radiation beam line machine, electron microscope, vacuum pump set aurora test equipment, analysis and testing instruments; (3) mechanical equipment industry: material preparation equipment, vacuum testing equipment, vacuum filtration equipment, material purification equipment, ultra-high vacuum exhaust equipment; (4) medical equipment industry: dental instruments, dialyzer; Biological products industry: material purification and pharmaceutical preparation; (5) packaging industry: food, medicine, biological products and other packaging equipment; 6 vacuum metallurgy industry: vacuum furnace, nanometer material preparation equipment, vacuum testing equipment and other fields. Vortex pump as a molecular pump and small cryogenic pump before the pump is the best configuration to obtain oil-free vacuum system. Its main moving part is only one dynamic vortex disk, simple and the power of the small size under the same motion radius, less parts, simple and compact structure, small size of the whole machine, the dynamic and the static and dynamic vortex disk between the plate and the pump cavity, small gap between moving parts in the pump and the pump cavity without friction, so almost no wear and tear, stable operation, small power consumption, small gas flow loss, high working reliability, long service life, easy maintenance, low maintenance cost, high volume efficiency. Air cooling without water cooling.
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2019 ARMPROD Expo
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