The
vacuum pump shall be able to discharge all steam volume caused by the whole
process of vacuum technology processing process under its pressure. Properly
constitute the vacuum pump. Because the vacuum pump has optional vacuum pumping,
even if a certain pump is selected, the vacuum pumping regulations cannot be
considered. Multiple pumps must be formed to fill each other to consider the
vacuum pumping regulations. For example, the titanium lift pump has a high pump
efficiency for hydrogen, but can not pump helium, while the three pole magnetron
sputtering ion pump (or the two pole asymmetric encrypted negative magnetron
sputtering ion pump) has a certain pump efficiency for argon. If the two are
combined, the vacuum pump equipment will obtain a good vacuum value.
Vacuum
pump
When the vacuum pump cannot work under atmospheric pressure, the vacuum
pump must be prepared for treatment. The inlet and outlet working pressure of
the vacuum pump is less than atmospheric pressure, so the front pump must be
used, so it must form an application pump. Provisions of vacuum technology on
oil environmental pollution. If the machinery and equipment are strictly managed
without oil stains, various gasoline free pumps should be selected, such as
water ring pump, carbon molecular sieve suction pump, magnetron sputtering ion
pump, cryogenic pump, etc. If the regulations are not strict, you can choose an
oil vacuum pump, plus some anti oil environmental pollution countermeasures, or
cold trap, baffle, oil trap, etc., you can also clean up the regulations of the
vacuum pump.
The vacuum pump shall be installed in a solid place on the
ground, with sufficient indoor space nearby, which is conducive to inspection,
maintenance and repair. The subgrade engineering level shall be maintained under
the vacuum pump base. It is recommended to pad damping rubber or cast and
install with anchor screws at the four corners of the base to ensure that the
vacuum pump operates stably and has little vibration.
The connecting pipeline
between the vacuum pump and the system software shall have reliable sealing
performance. For small vacuum pumps, metal hose can be used, and acid and alkali
resistant vulcanized rubber can be used as the connecting gasket. For small
vacuum pumps, vacuum pump rubber hose can be used for connection. The pipeline
shall not be lower than the breathing specification of the vacuum pump, and the
specified pipeline shall be short and less bends. (when welding steel pipe, the
welding slag in the pipeline shall be eliminated, and it is forbidden to
penetrate into the vacuum pump chamber.)
10/25/2021
The sealing between the vacuum pump and the system shall be reliable
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