Dry, air-cooled multi-stage Roots pumps in the range can be directly used to replace oil-lubricated rotary vane vacuum pumps in the range of available pumping speeds because of their involvement and performance parameters.
The advantages of multistage Roots pumps include:
There is no lubricant in the gas displacement area.
Medium pumped with oil or ion is free from any pollution.
No working fluid treatment problem
Constant vacuum parameters with long-term stability
High Reliability Due to Minimum Number of Fragile Parts
When each power supply is connected to the main power supply frequency and general power supply, it has a constant working parameter of one-phase or three-phase converter.
Air cooling, no installation cost and water cooling operation cost
Continuous operation for high inlet pressure
Long maintenance intervals lead to low operating costs
Selection of Remote Control Using Frequency Converter
Ideally used for this application due to adjustable rpm, reduced noise level, energy utilization and power input
Minimum leakage rate
Ideal front stage pump for turbomolecular pump and Roots pump
Certification meets UL/CSA and SEMI S2 requirements
steam
If there is no additional measures, because of its relatively low working temperature, the use of oil-free pumps will have the risk of condensation in the pump. Similar to rotary vane vacuum pumps, multi-stage Roots pumps are equipped with air ballasts to increase steam tolerance and steam capacity of pumps. The formation of condensate in the pump increases the limit pressure, which leads to corrosion, and in the worst case, will lead to pump failure.
In the case of no gas town, the pump can transport medium with moisture content up to 5%. Using the standard pump gas town, the steam tolerance is 10 hPa and the steam capacity is 100 g. H - 1. In the special pump version (CV, condensable steam), gas throughput can be increased to achieve steam tolerance of about 100 hPa and steam capacity of 700 to 1,000 G H - 1, depending on the ambient temperature.
As for rotary vane vacuum pumps: before evacuating steam, the pump body must be preheated by air ballast for at least half an hour. High temperature pump body reduces condensation. Other ways to reduce condensation include obtaining the lowest possible outlet pressure and discharging condensate separately. Vertical exhaust pipes must be used to prevent back pressure at the exit. If there is an extraction system, the export should be connected to it.
Dust and Particles
If there is no control over the entry of large particles, in the worst case, the multi-stage Roots pump can be blocked and completely failed. Therefore, in dust-containing process or glass manufacturing, filter is installed at the intake side to prevent damage.
Corrosive gas
Pumps are not suitable for pumping large quantities of corrosive gases. In this respect, multistage Roots pumps can be used in corrosive gas processes in the semiconductor, solar and paint industries (see Section 4.6). However, the pump can be used to treat at least a small amount of corrosive gas. In this case, the version with inert gas purification is used, in which the bearing is protected by inert gas curtain, and the process gas is diluted by introducing inert gas into a pump stage.
Its high air tightness guarantees the long-term use of multistage Roots pumps and the best solution for the use of expensive gases (4He, 3He, isotope labeled gases) in the gas circuit.
Light Gas and High Vacuum
Multistage Roots pumps have outlet valves to prevent moisture and oxygen from diffusing back into the suction chamber, which can lead to chemical reactions in the pump in the application of corrosive gases. If vacuum is needed to prevent light gas accumulation and reflux diffusion, the valve must be opened regularly (e.g. through the gas town) in application.
Even if the use of micro vacuum or gas towers at the exhaust is sufficient to replace even continuous helium gas throughput, such as in cryostat of evaporator, the performance data are almost the same as that of nitrogen or air.
Roots Blowers Price
Rotary Vane Vacuum Pump Structure
Roots Vacuum Pump Supplier
Rotary Vane Vacuum Pump Supplier
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