12/19/2018

Roots vacuum pump for semiconductor equipment


Roots vacuum pump features:


There is no oil in the pump chamber to achieve a high clean vacuum.
The rotor has good geometric symmetry for low noise and long life.
The pump is made of aluminum alloy as a whole, which realizes fast heat dissipation and corrosion resistance of the pump and improves the service life of the pump.
It starts fast and can reach the vacuum in a short time.
Compact and lightweight, with a small footprint.

Roots vacuum pump product application:

● Lighting, electronics, optics, semiconductors, analytical instruments, etc.
● Coating, sputtering, ion plating, liquid crystal injection, vacuum drying, freeze drying, vacuum degassing, etc.
● Vacuum heat treatment furnace, sintering furnace, brazing furnace, leak detection equipment, CO2 laser equipment, etc.

Vacuum pump product application:

Vacuum pumps in vacuum packaging, food processing, pneumatic conveying, semiconductors, solar, plastics, chemicals and pharmaceuticals, hospital healthcare, environmental engineering, composites, metallurgy, oil and gas, surface treatment technology, electronics and power, wood processing, There are a wide range of applications in many industrial fields such as mechanical manufacturing.
Roots vacuum pump advantages:
1. Protect the lubricating oil, not emulsified, not contaminated by the medium;
2. Protect the bearing and gear to make it last longer;
3, reduce the frequency of oil and oil change, maintenance is more convenient.

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